Agile, Precise Power Delivery for Demanding High-Speed Matching Applications
Advanced Energy's Navigator II FCi enables improved process control with precise power delivery and tuning. The high-speed matching network is optimized for critical, power sensitive, short duration plasma process steps. Conventional longer steps and wide tuning range, traditionally handled by vacuum capacitor-based matching networks, are also supported. Through high-speed tuning, the Navigator II FCi offers many process control enhancements.
- Reduced plasma stabilization time
- No plasma dropout between process recipe transitions
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